(Ultra)high purity clean pressure gauge-UPG50 / HPG50

(Ultra)High purity gas delivery systems • Gas sticks • Process gas analyzers • Semiconductor

• 304 Stainless steel case
• Electropolished 316L VAR SS/316L SS wetted parts
• Male/Female swivel process connections
(compatible with VCR)
• Helium leak tested to 1X10-9Pa·m³/s
• Suitable for class 100/ISO Class 5 environments

(Ultra)High clean design & packaging
• 100% Helium leak tested
• Double-bagged packaging
• Nitrogen purged

现在联系下载为pdf

细节

气路表面粗糙度 Gas path sur face finish
Ra< 10 µin (0.25µm Internal)-EP(VCR)
Ra< 16 µin (0.4µm Internal)-BA(VCR)
Ra< 32 µin (0.8µm Internal)-BA(NPT)
洁净度等级 Cleanliness
IEST-STD-CC1246 Level 100 R1
(Exceeds ASME B40. 100 Level IV)
负载能力 Load Capacity
稳定：75% FS
脉动压力：66%FS
Short time :100% FS
工作环境 Working Environment
环境温度-40℃~65℃
中等最大+100°C
相对湿度50%
温度影响 Temperature Influence
高于和低于温度的准确度
参考温度（20°C）将受到影响
满量程每 10°C 大约降低 ±0.4%