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(Ultra)high purity clean pressure gauge-UPG50 / HPG50

(Ultra)High purity gas delivery systems • Gas sticks • Process gas analyzers • Semiconductor


• 304 Stainless steel case
• Electropolished 316L VAR SS/316L SS wetted parts
• Male/Female swivel process connections
(compatible with VCR)
• Helium leak tested to 1X10-9Pa·m³/s
• Suitable for class 100/ISO Class 5 environments

(Ultra)High clean design & packaging
• 100% Helium leak tested
• Double-bagged packaging
• Nitrogen purged


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細節

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產品規格

公称直径 Nominal Diameter (mm)
50 mm
精度等级 Accuracy (%)
ASME 40.100-2013 A 級
(± 2/1/2% of span)
压力范围 Pressure Range

0 ... 0.1 to 0 ... 40 MPa（0 ... 15 to 0 ... 6,000 psi）Or all other equivalent negative pressure ranges or positive and negative pressure ranges

气路表面粗糙度 Gas path sur face finish
Ra< 10 µin (0.25µm Internal)-EP(VCR)
Ra< 16 µin (0.4µm Internal)-BA(VCR)
Ra< 32 µin (0.8µm Internal)-BA(NPT)
洁净度等级 Cleanliness
IEST-STD-CC1246 Level 100 R1
(Exceeds ASME B40. 100 Level IV)
负载能力 Load Capacity
穩定：75% FS
脈動壓力：66%FS
Short time :100% FS
工作环境 Working Environment
環境溫度-40℃~65℃
中等最大+100°C
相對濕度50%
温度影响 Temperature Influence
高於和低於溫度的準確度
參考溫度（20°C）將受到影響
滿量程每 10°C 大約降低 ±0.4%

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