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  • Ultra-high purity pressure gauge(UPG,L-pressure) - VCR1/4" Female Face Seal Swivel / EP grade-2

Ultra-high purity pressure gauge(UPG,L-pressure) - VCR1/4" Female Face Seal Swivel / EP grade-2


  • ●All parts are treated with ultrasonic purified water
  • ●Welding is performed in an oxygen-free vacuum chamber protected by high purity argon gas
  • ●The product has passed strict pressure and air  tightness testing, up to 1X10-9Pa·m³/s
  • ●Suitable for the ultra-high purity gas distribution system used in a semiconductor, electronic,medical,biotechnology and pharmaceutical industry
  •  

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PRODUCT SPECIFICATION

 

Model

UPG50-VP/AP-G-L/C

 

Nominal Diameter (mm)
50


Pressure Range
Item No:66002--- -30inHG~0~300psi / 0~600psi


Displacement (mm)
1.1~1.4


Accuracy (%)
ASME 40.100-2013 GradeA


Gas path sur face finish
< 10 Ra µin (Internal)

 

Cleanliness
IEST-STD-CC1246 Level 100 R1
(Exceeds ASME B40. 100 Level IV)

 

Working Pressure

Stable                           75%   FS
Fluctuating pressure     66%   FS
Short time                     100% FS

 

Working Environment

Ambient Temperature     -40°C ~65°C
Medium max.                  +100°C
Relative humidity            50%

 

Temperature Influence

Accuracy at temperature above and below the reference temperature (20°C) will be effected by approximately ±0.4% per 10°C of full scale

 

STANDARD CONFIGURATION

 

Connection
VCR1/4" Fmale Face Seal Swivel
316L SS
VCR tubes and fittings
316L VAR SS (SEMI F20 UHP)
(available upon request)


Fitting
Lower Mount (L)
Center Back Mount (C)


Measuring Element
Bourdon tube : AISI 316L VM SS
Movement : 304 SS


Dial
Aluminum


Pointer
Aluminum


Case
304 SS (electrolytic polishing)


Window
Polycarbonate(PC)

PICTURE DETAILS

APPEARANCE AND INSTALLATION DIMENSION(MM)

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